Alan Anders

© 2017 Author.Boron at room temperature is insulating and therefore conventionally sputtered using radio-frequency power supplies including their power-matching networks. In this contribution, we show that through a suitable ignition assistance, via temporary application of a high voltage to the substrate holder or auxiliary electrode, the magnetron discharge can be ignited using a conventional mid-frequency power supply without matching network. Once the discharge is ignited, the assisting voltage can be reduced to less than 50 V, and after the boron target surface is at elevated temperature, thereby exhibiting sufficient conductivity, the assisting voltage can be turned off. The deposition of boron and boron nitride films has been demonstrated with a deposition rate of approximately 400 nm/h for a power of 250 W.

© 2016 Elsevier B.V.The effect of energetic ion bombardment on the properties of tantalum thin films was investigated. To achieve such energetic ion bombardment during the process the Ta thin films were deposited by deep oscillation magnetron sputtering, an ionized physical vapor deposition technique related to high power impulse magnetron sputtering. The peak power was between 49 and 130 kW and the substrate was silicon at room temperature and ground potential. The directionality and the energy of the depositing species was controlled by changing the ionization fraction of the Ta species arriving at the substrate at different peak powers. In this work, the surface morphology, microstructure, structure and hardness and Young's modulus of the films were characterized. The ion energy distributions were measured using an electrostatic quadrupole ion energy and mass spectrometer. The IEDs showed that the DOMS process applies a very energetic ion bombardment on the growing tantalum films. Therefore, with such conditions it was possible to deposit pure α-Ta without the use of additional equipment, i.e., without substrate bias or substrate heating. Conditions are therefore significantly different than in previous works, offering a much simpler and cheaper solution to up-scale for industrial operation.

© 2016 Optical Society of America.We propose an all-solid-state tunable Bragg filter with a phase transition material as the defect layer. Bragg filters based on a vanadium dioxide defect layer sandwiched between silicon dioxide/titanium dioxide Bragg gratings are experimentally demonstrated. Temperature dependent reflection spectroscopy shows the dynamic tunability and hysteresis properties of the Bragg filter. Temperature dependent Raman spectroscopy reveals the connection between the tunability and the phase transition of the vanadium dioxide defect layer. This work paves a new avenue in tunable Bragg filter designs and promises more applications by combining phase transition materials and optical cavities.

© 2016 AIP Publishing LLC.We present evidence for breathing modes in magnetron sputtering plasmas: periodic axial variations of plasma parameters with characteristic frequencies between 10 and 100 kHz. A set of azimuthally distributed probes shows synchronous oscillations of the floating potential. They appear most clearly when considering the intermediate current regime in which the direction of azimuthal spoke motion changes. Breathing oscillations were found to be superimposed on azimuthal spoke motion. Depending on pressure and current, one can also find a regime of chaotic fluctuations and one of stable discharges, the latter at high current. A pressure-current phase diagram for the different situations is proposed.

The ion energies and fluxes in the high power impulse magnetron sputtering plasma from a Nb target were analysed angularly resolved along the tangential direction of the racetrack. A reactive oxygen-containing atmosphere was used as such discharge conditions are typically employed for the synthesis of thin films. Asymmetries in the flux distribution of the recorded ions as well as their energies and charge states were noticed when varying the angle between mass-energy analyser and target surface. More positively charged ions with higher count rates in the medium energy range of their distributions were detected in +EB than in -EB direction, thus confirming the notion that ionisation zones are associated with moving potential humps. The motion of the recorded negatively charged high-energy oxygen ions was unaffected. NbOxthin films at different angles and positions were synthesised and analysed as to their structure and properties in order to correlate the observed plasma properties to the film growth conditions. The chemical composition and the film thickness varied with changing deposition angle, where the latter, similar to the ion fluxes, was higher in +EB than in -EB direction.